Picture of Aligneur Simple Face
Current status:
AVAILABLE
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
You must be logged in to view files.

Manual machine
Wafers: small pieces to 4 inch
               large rotations: +/- 45°
Alignment precision
Top: 2 µm
Bottom: / not possible

Resolution: 3 µm (hard contact)

Tool name:
Aligneur Simple Face
Area/room:
SB1 - Lithographie 1 (Masqueur)
Category:
Lithography
Manufacturer:
Karl Suss
Model:
MG1410

Instructors

Licensed Users

You must be logged in to view tool modes.