Picture of Aligneur Simple Face
Current status:
AVAILABLE
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2nd Responsible:
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Manual machine
Wafers: small pieces to 4 inch
               large rotations: +/- 45°
Alignment precision
Top: 2 µm
Bottom: / not possible

Resolution: 3 µm (hard contact)

Tool name:
Aligneur Simple Face
Area/room:
SB1 - Lithographie 1 (Masqueur)
Category:
Lithography
Manufacturer:
Karl Suss
Model:
MG1410
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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