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 NameCategory1st responsible2nd responsibleManufacturerModel
View ACS 200LithographyLaurent ROBERT SUSS MicrotecACS200 GEN3
View Aligner Double Side EVGLithographyLaurent ROBERT EVG620
View Aligner DUV EVGLithographyLaurent ROBERT EVG620
View Aligneur Simple FaceLithographyLaurent ROBERT Karl SussMG1410
View Alphacam SoftwarePackagingSylwester BARGIEL Vero SoftwareAlphacam 2018 R2
View Bond Tester DAGE4000PlusPackagingSylwester BARGIEL NordsonDAGE 4000 plus
View Bureau 3 (Couloir Salle Blanche)Access to the cleanroomGwenn ULLIAC FEMTO-STMIMENTO Platform
View CMP Alpsitec E460Dicing - PolishingLudovic GAUTHIER-MANUEL AlpsitecE460
View DRIE 6 poucesPlasma etchingDjaffar BELHARETSamuel QuesteSPTSRapier Omega C2L
View DRIE AlcatelPlasma etchingDjaffar BELHARETSamuel QuesteAlcatel601E
View DRIE SPTSPlasma etchingDjaffar BELHARETSamuel QuesteSPTSRapier
View DRIE STSPlasma etchingDjaffar BELHARETSamuel QuesteSTSAPS
View DRIE-Cl-OmegaPlasma etchingDjaffar BELHARETSamuel QuesteTrikonOmega 201
View DSM8LithographyLaurent ROBERT Suss MicrotecDSM8 GEN2
View Electroformage 1ChemistryMarion VieiraLaurent ROBERTXXXXXX
View Electroformage 2ChemistryMarion VieiraLaurent ROBERTXXXXXX
View Ellipso Jobin YvonCharacterizationLaurent ROBERTFranck CHOLLETJobin YvonUvisel-NIR
View Evap MEB600DepositionLilia ARAPANStefania OLIVERIPlassysMEB600
View Evap-EVA450DepositionStefania OLIVERILilia ARAPANAlliance ConceptEVA450
View FEMTOprint 3D Glass machiningPackagingSylwester BARGIEL FEMTOPRINTf100 aHead Enhanced
View FIB FEINanotechnologyRoland SALUTMarina RASCHETTIFEI Helios Nanolab 600i
View Filmetrics F50 EXRLithographyLaurent ROBERT FilmetricsF50 EXR
View Flip-Chip bonder FC250PackagingSylwester BARGIEL Suss MicrotecFC250
View Four RTPThermal processesLilia ARAPANStefania OLIVERIAnnealsysAS-Premium RTP
View Four-tube1-SiThermal processesStefania OLIVERILilia ARAPANAETXXX
View Four-tube2-LiNbO3Thermal processesStefania OLIVERILilia ARAPANAETXXX
View Four-tube3-1000°C maxThermal processesStefania OLIVERILilia ARAPANAETXXX
View FSMCharacterizationMarina RASCHETTILaurent ROBERTFSMG500 TC
View GBX MCAT Contact Angle MetrologyCharacterizationFranck CHOLLET GBXMCAT
View HF VaporChemistryMarion VieiraLaurent ROBERTIdonusHF VPE-100
View Hot Plate ManualLithographyLaurent ROBERT PrazithermXXX
View Hot Plate Programmable 1LithographyLaurent ROBERT PrazithermXXX
View Hot Plate Programmable 2LithographyLaurent ROBERT PrazithermXXX
View ICPECVDDepositionStefania OLIVERILilia ARAPANSentechSI 500D
View I-V & C-V Probe stationCharacterizationFranck LARDET-VIEUDRIN CascadeMicrotechEPS 150 Coax plus
View Laminoir Rohm-HaasLithographyLaurent ROBERT Rohm and Haas Electronic360/N
View Masqueur HeidelbergLithographyGuillaume JutziLaurent ROBERTHeidelbergDWL200
View MEBCharacterizationMarina RASCHETTIRoland SALUTFEIQuanta 450W
View MEB/ SEM Apreo SCharacterizationMarina RASCHETTIRoland SALUTThermofisherApreo S
View Megasonic cleaner CL200PackagingSylwester BARGIEL Suss MicrotecCL200
View MEMS AnalyserCharacterizationFranck LARDET-VIEUDRIN PolytecMSA-500
View Microscope optique Leica DM8000CharacterizationMarina RASCHETTIRoland SALUTLeicaDM8000
View NanoscribeLithographyGwenn ULLIAC NanoscribePhotonic Professional GT
View Oven Litho 1LithographyLaurent ROBERT ThermocenterXXX
View Oven Litho 2LithographyLaurent ROBERT ThermocenterXXX
View Pick and Place HB70PackagingSylwester BARGIELFranck LARDET-VIEUDRINTPTHB-70
View Plasma-CuteOther processesFranck CHOLLET Femto-ScienceCute
View Polisseuse Logitech PM6Dicing - PolishingLudovic GAUTHIER-MANUEL LogitechPM6
View Profilomètre confocal NanojuraCharacterizationFranck CHOLLET NanojuraUHP
View Profilomètre interférométrique ZYGOCharacterizationFranck CHOLLET ZYGOVerifire GPI XP/D
View Pulvé MP450SDepositionLilia ARAPANStefania OLIVERIPlassysMP450S
View Pulvé MP500DepositionStefania OLIVERILilia ARAPANPlassysMP500
View Pulvé MP700SDepositionStefania OLIVERILilia ARAPANPlassysMP700S
View QS WET 300LithographyGuillaume JutziMarion VieiraSolarsemi (Microtest)QSW300 SM
View RIE CorialPlasma etchingDjaffar BELHARETSamuel QuesteCorial200 R
View RIE-F-PlassysPlasma etchingDjaffar BELHARETSamuel QuestePlassysXXX
View RIE-O2-NanoplasPlasma etchingDjaffar BELHARETSamuel QuesteNanoplasDSB 6000
View Scie DAD 321Dicing - PolishingLudovic GAUTHIER-MANUEL DISCODAD 321
View Scie DAD 3350Dicing - PolishingLudovic GAUTHIER-MANUEL DISCODAD 3350
View SEMI AUTOMATIC PROBERCharacterizationValérie SoumannThomas BARONMICROWORLDSignatone & own software
View Sorbonne BHFChemistryMarion VieiraLaurent ROBERTXXXXXX
View Sorbonne HFChemistryMarion VieiraLaurent ROBERTXXXXXX
View Sorbonne KOH 1 ( Process standard)ChemistryMarion VieiraLaurent ROBERTXXXXXX
View Sorbonne KOH 2 (Process FEMTOPRINT)ChemistryMarion VieiraSylwester BARGIELXXXXXX
View Sorbonnes Acide et SolvantChemistryMarion VieiraLaurent ROBERTMinaservicesWet Bench
View Spin Coater OC22LithographyLaurent ROBERT SolarsemiOC ST22
View Spin Coater RC-8LithographyLaurent ROBERT Karl SussRC-8
View Spray coatingLithographyLaurent ROBERT SUSS MicrotecAlta Spray
View Station E-BeamNanotechnologyRoland SALUTMarina RASCHETTIRaithE_line
View STYLUS PROFILOMETER DEKTAK XTCharacterizationMarina RASCHETTILaurent ROBERTBrukerDektak XT
View Surface activation NP12PackagingSylwester BARGIEL Suss MicrotecNP12
View TechnotransChemistryMarion VieiraLaurent ROBERTTechnotransMicroform 100
View Wafer Aligner-Bonder AML 6"PackagingSylwester BARGIEL AMLAWB
View Wafer bonder AML402PPackagingSylwester BARGIEL Applied Microengineering Ltd.402P
View Wafer bonder EVG501PackagingSylwester BARGIEL EVG501
View Wafer surface measurement Vantage 2CharacterizationLudovic GAUTHIER-MANUEL AccelonixCybertechnologies Vantage 2
View Wetbench for PDMSOther processesFranck CHOLLET NCNC
View Wire Bonder TPT 16PackagingFranck LARDET-VIEUDRIN TPTHB-16
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