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ALD (D16)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Stefania OLIVERI
2nd Responsible:
Matthieu Micolle
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Description
Details
Tool name:
ALD
Area/room:
SB2 - Dépôt - Fours
Category:
Deposition
Manufacturer:
VEECO
Model:
Fiji Gen 2
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