Picture of Wetbench for PDMS
Current status:
AVAILABLE
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The wetbench is exclusively used for processing of PDMS and similar contaminating polymers that cannot be used in the main cleanroom.

The fume in the wetbench is pumped out with a possibility to have laminar flow to protect from dust. It is equipped with a vacuum jar for debubbling, a spin-coater for coating and an oven for curing polymer.

It is possible to use common solvent like ethanol and acetone, with compulsory recycling.

  • Caractéristiques techniques
    • Fume extraction
    • Laminar flow
    • Air gun with N2
    • Vaccum jar : D. 150 mm
    • Spincoater : speed 1000-4000 /min, chip and wafer vacuum holder
    • Oven (at the back) : 20°C-300°C
Tool name:
Wetbench for PDMS
Area/room:
Hors salle blanche
Category:
Other processes
Manufacturer:
NC
Model:
NC
Max booking time, day:
8 hours
Max booking time, night:
hours
No. of future bookings:

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