The wetbench is exclusively used for processing of PDMS and similar contaminating polymers that cannot be used in the main cleanroom.
The fume in the wetbench is pumped out with a possibility to have laminar flow to protect from dust. It is equipped with a vacuum jar for debubbling, a spin-coater for coating and an oven for curing polymer.
It is possible to use common solvent like ethanol and acetone, with compulsory recycling.
- Caractéristiques techniques
- Fume extraction
- Laminar flow
- Air gun with N2
- Vaccum jar : D. 150 mm
- Spincoater : speed 1000-4000 /min, chip and wafer vacuum holder
- Oven (at the back) : 20°C-300°C