The wetbench is exclusively used for processing of PDMS and similar contaminating polymers that cannot be used in the main cleanroom.

The fume in the wetbench is pumped out but there is no laminar flow to protect the device from dust. It is equipped with a scale to weigh the PDMS and its curing agent, a vacuum jar for debubbling, a spin-coater for coating (*currently unavailable*) and there is an oven next to it for curing polymer.

It is possible to use common solvent like ethanol and acetone inside the wetbench, with compulsory recycling.

• Technical characteristices
  • Fume extraction
  • Air gun with N2
  • Scale for dosing PDMS
  • Vaccum jar : D. 150 mm
  • Spincoater : speed 1000-4000 /min, chip and wafer vacuum holder *currently not available*)
  • Oven (at the back) : 20°C-300°C