The wetbench is exclusively used for processing of PDMS and similar contaminating polymers that cannot be used in the main cleanroom.

The fume in the wetbench is pumped out with a possibility to have laminar flow to protect from dust. It is equipped with a vacuum jar for debubbling, a spin-coater for coating and an oven for curing polymer.

It is possible to use common solvent like ethanol and acetone, with compulsory recycling.

• Caractéristiques techniques
  • Fume extraction
  • Laminar flow
  • Air gun with N2
  • Vaccum jar : D. 150 mm
  • Spincoater : speed 1000-4000 /min, chip and wafer vacuum holder
  • Oven (at the back) : 20°C-300°C