Picture of Spin Coater RC-8
Current status:
AVAILABLE
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Manual spin coater

Speed up to 5000 rpm (steps of 10 rpm)

Acceleration up to 5000 rpm/s (steps of 100 rpm/s)

Wafer Chuck: 76 and 100 mm wafers

Customized chucks for small pieces

Tool name:
Spin Coater RC-8
Area/room:
SB2 - Lithographie 2 (Aligneurs)
Category:
Lithography
Manufacturer:
Karl Suss
Model:
RC-8

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Licensed Users

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