RAITH VELION
SEM - Scanning Electron Microscope
- Source : Schottky Field Emitter
- Acceleration Voltage : 5 kV – 20 kV
- Beam current : 40 pA – 500 pA
- Resolution : 5 nm
FIB – Focused Ion Beam
- Source : LMAIS AuGeSi
- Wien Filter ExB
- Acceleration Voltage : 10 kV to 35 kV
- Beam current : 5 pA – 1 nA
- Resolution @ 35 kV : 10 nm
Stage
-XY : 100 mm x 100 mm
DC motors + piezos for fine positionning
Laser interferometer : resolution 1 nm
- Z : 20 mm
- Rotation & Tilt : available only for small samples (< 1 cm²)
Detectors
- ETD
- IR CCD
Patterning
- Speed : 50 MHz
- Resolution : 20 bit
- Dynamic beam control
- Stitching accuracy : 50 nm
- Overlay accuracy : 50 nm
- Traxx and Periodixx
- Files : GDSII