Picture of ICP-Chlorée
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Djaffar BELHARET
2nd Responsible:
Samuel Queste
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Description
Details
Tool name:
ICP-Chlorée
Area/room:
SB2 - Gravure
Category:
Plasma etching
Manufacturer:
Plasma-Therm
Model:
Corial 201 IL
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