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CPD Sécheur super-critique (L23)
Current status:
DOWN
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Responsibles
1st Responsible:
Gwenn ULLIAC
2nd Responsible:
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Description
Details
Tool name:
CPD Sécheur super-critique
Area/room:
SB1 - Lithographie 1 (Masqueur)
Category:
Lithography
Manufacturer:
TOUSIMIS
Model:
Autosamdri 931
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