• Mechanical testing of micro-components in both PULL and SHEAR modes, destructible or not
• Highly configurable and versatile system with exchangeable cartridges and range of load tools
• Cartridges are selected to ensure large range of load force from 250mg up to 250kg
• Automatic surface detection for SHEAR with Step back accuracy: ±0.25µm
• Vacuum/mechanical holders compatible with wide range of substrate sizes
• Various other tests possible 

• Testing of electrical interconnects made by

• Wire bonding (pull)
• Bump/Pillars bond (shear)
• Test of flip-chip bonding (shear)
• Creep tests (static load) on solders, polymers, adhesives, alloys

• Testing of wafer-level bonding quality
• Die size 10x10mm²
• High force up to 200kg
• Horizontal Stud-pull test

Cartridges have 4 selectable load ranges (accuracy for 1-2 ranges ±0.1%, for 3-4 ranges ±0.25%)

PULL mode:

• P100G for Wire Pull Destructive test (100±0.1g, 50±0.05g, 25±0.063g, 10±0.025g)

SHEAR mode:

• S250G for Ball Shear Destructive test (250±0.25g, 100±0.1g, 50±0.125g, 25±0.063g)
• S5KG for Die Shear Destructive test (5000±5g, 2000±2g, 1000±2.5g, 400±1g)
• S200KG for Die Stud Pull Destructive test (200±0.2kg, 100±0.1kg, 50±0.125kg, 20±0.05kg)

For PULL cartridge P100G

• PULL-4000-HK-10-3: Hook, Diameter 76µm (application for wire bonding, 360^o hook rotation)

For SHEAR cartridge S250G

• SHEAR-062-04: Diameter 1.57mm, width 102µm (application for ball 60-85µm)
• SHEAR-062-10: Diameter 1.57mm, width 254µm

For SHEAR cartridge S5KG

• SHEAR-187-050: Diameter 4.57mm, width 1.27mm
• SHEAR-187-150: Diameter 4.57mm, width 4.75mm
• SHEAR-187-cust: Diameter 4.75mm, width 10mm

For SHEAR cartridge S250KG

• SHEAR-250-354: Diameter 6.35mm, width 9mm

High force, high precision motorized stage

Working surface: 280x280mm² (flat plate for vacuum holder, plate with M4 mounting threads)

Travel range: max 160mm

Universal mechanical workholder (vice): vacuum (max 40kg shear/20kg pull) or bolt fixing,

Adapter allowing rotation of sample holders

Universal substrate holder: vacuum/mechanical: Wafers 3”, 4”, 6”

Microscope Leica S9D, magnification up to 69.3x                                                      

Trinocular camera: image capture, real-time video recording

PARAGON software:

• Easy data treatment using interactive graphs
• Automatic reporting with Word templates
• Data export to editable formats (.dat, .exl)