Picture of Polisseuse Logitech PM6
Current status:
AVAILABLE
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2nd Responsible:
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TECHNICAL SPECIFICATIONS

 

APPLICATIONS

 

Features

Substrate & Wafers can be processed

Max size: diam. 4" / 10 mm thickness

Min size: 10 mm²

Thickness precision: 1 µm

Speed: 1 to 100 rpm

Automatic flatness control & fix

Pressure of work adjusted with loads

Plate size: diam. 300 mm

Optical polishing

Material thinning

 

Holding

UV tape on vaccum chuck

Processed materials

Si, Glass, Quartz, LiNbO3, LiTaO3, PZT,

Si3N4, Langasite, Langatate, Stainless steel

Abrasives

Aluminium oxyde, Silicon Carbide, Diamond, Colloïdale Silica

Tool name:
Polisseuse Logitech PM6
Area/room:
Hors salle blanche
Category:
Dicing - Polishing
Manufacturer:
Logitech
Model:
PM6
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

Instructors

Licensed Users

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