Picture of STYLUS PROFILOMETER DEKTAK XT
Current status:
AVAILABLE
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TECHNICAL SPECIFICATIONS

STAGES:

4”-6” wafer vacuum chuck

Motorized X/Y, motorized 360° rotation

STYLUS:

2 µm radius tip, 60° cone angle

Force: 0,03 to 15 mg

Safe mode for scratch-free measurements (resists, soft metals)

SCAN:

Direction: front to back

Minimum length: 50 µm

VERTICAL RESOLUTION:

Minimum step measurable: few nm

Maximum height: 1 mm

SOFTWARE:

Vision 64 operation and analysis software

Stitching

3D mapping

Stress measurement

Automation setup

APPLICATIONS :

  • Step height measurement
  • Roughness measurement
  • Surface topography
  • 3D mapping
  • Thin film stress measurement
Tool name:
STYLUS PROFILOMETER DEKTAK XT
Area/room:
SB1 - Caractérisation
Category:
Characterization
Manufacturer:
Bruker
Model:
Dektak XT
Max booking time, day:
8 hours
Max booking time, night:
0 hours
No. of future bookings:

Instructors

Licensed Users

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