TECHNICAl SPECIFICATIONS
APPLICATIONS
MEASUREMENT CAPABILITIES
Z Resolution: <0.1 nm
XY resolution:
Z measurement range : >50 µm
Smooth profile with step < 300 nm
Surface profile measurement, Planarity (waviness, bow, warp) measurement
SAMPLE
Large stage suitable for Ø < 100 mm
Thickness range: 0 to 100 mm
Reflective materials: glass, silicon, metal…
OPTICS
Fizeau phase shifting interferometer
He-Ne laser (l = 633 nm)
Camera 1000 x 1000 pixels
Motorized zoom x1 to x6 (not indexed)
Motorized focus (not automatic)