Picture of Profilomètre interférométrique ZYGO
Current status:
AVAILABLE
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2nd Responsible:
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TECHNICAl SPECIFICATIONS

APPLICATIONS

MEASUREMENT CAPABILITIES

Z Resolution: <0.1 nm

XY resolution:

  • 100 µm (100 mm field)
  • 15µm (15 mm field)

Z measurement range : >50 µm

Smooth profile with step < 300 nm

Surface profile measurement,          Planarity (waviness, bow, warp) measurement

SAMPLE

Large stage suitable for Ø < 100 mm

Thickness range: 0 to 100 mm

Reflective materials: glass, silicon, metal…

OPTICS

Fizeau phase shifting interferometer

He-Ne laser (l = 633 nm)

Camera 1000 x 1000 pixels

Motorized zoom x1 to x6 (not indexed)

Motorized focus (not automatic)

Tool name:
Profilomètre interférométrique ZYGO
Area/room:
SB1 - Caractérisation
Category:
Characterization
Manufacturer:
ZYGO
Model:
Verifire GPI XP/D
Max booking time, day:
8 hours
Max booking time, night:
0 hours
No. of future bookings:

Instructors

Licensed Users

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