Picture of Evap MEB600
Current status:
AVAILABLE
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Tool name:
Evap MEB600
Area/room:
SB2 - Dépôt - Fours
Category:
Deposition
Manufacturer:
Plassys
Model:
MEB600

Don't start process before 5*10-6 mbar, best under 1*10-6mbar

 

 

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