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Evap MEB600 (D5)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Stefania OLIVERI
2nd Responsible:
Matthieu Micolle
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Description
Details
Tool name:
Evap MEB600
Area/room:
SB2 - Dépôt - Fours
Category:
Deposition
Manufacturer:
Plassys
Model:
MEB600
info sur process
Don't start process before 5*10
-6
mbar, best under 1*10
-6
mbar
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