Picture of Spin Coater OC22
Current status:
AVAILABLE
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TECHNICAL SPECIFICATIONS

APPLICATIONS

Spin speed

≤ 7000 rpm

Photoresists spin coating

Cover

Close, middle or open

with some speed limitations

Wafer Chuck

Ø=100mm max (circular) and small pieces

(only vacuum fixation)

Recipes

Selection and edition

with the touch screen display

Hot Plate

250 °C max, Ø=152mm max

vacuum contact baking

Tool name:
Spin Coater OC22
Area/room:
SB2 - Lithographie 2 (Aligneurs)
Category:
Lithography
Manufacturer:
Solarsemi
Model:
OC ST22
Max booking time, day:
hours
Max booking time, night:
0 hours
No. of future bookings:

Instructors

Licensed Users

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