TECHNICAL SPECIFICATIONS
APPLICATIONS
Spin speed
≤ 7000 rpm
Photoresists spin coating
Cover
Close, middle or open
with some speed limitations
Wafer Chuck
Ø=100mm max (circular) and small pieces
(only vacuum fixation)
Recipes
Selection and edition
with the touch screen display
Hot Plate
250 °C max, Ø=152mm max
vacuum contact baking