TECHNICAL SPECIFICATIONS

APPLICATIONS

Spin speed

≤ 7000 rpm

Photoresists spin coating

Cover

Close, middle or open

with some speed limitations

Wafer Chuck

Ø=100mm max (circular) and small pieces

(only vacuum fixation)

Recipes

Selection and edition

with the touch screen display

Hot Plate

250 °C max, Ø=152mm max

vacuum contact baking