LIMS - [View Tool]

No access? Apply for access here...

Username:

Password:

laser lithography system MLA150 high resolution (L1)

Current status:

DOWN

Book | Log|

Show/Collapse all

Responsibles

1st Responsible:

Guillaume Jutzi

2nd Responsible:

Files

You must be logged in to view files.

Description

Details

Tool name:

laser lithography system MLA150 high resolution

Area/room:

SB1 - Lithographie 1 (Masqueur)

Category:

Lithography

Manufacturer:

Heidelberg

Model:

MLA150 high resolution

Tool Modes

You must be logged in to view tool modes.