Picture of laser lithography system MLA150 high resolution
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Guillaume Jutzi
2nd Responsible:
Laurent ROBERT
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Description

Details
Tool name:
laser lithography system MLA150 high resolution
Area/room:
SB1 - Lithographie 1 (Masqueur)
Category:
Lithography
Manufacturer:
Heidelberg
Model:
MLA150 high resolution
Booking
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:
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Tool Modes
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