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laser lithography system MLA150 high resolution (L1)

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Guillaume Jutzi

2nd Responsible:

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Description

Details

Tool name:

laser lithography system MLA150 high resolution

Area/room:

SB1 - Lithographie 1 (Masqueur)

Category:

Lithography

Manufacturer:

Heidelberg

Model:

MLA150 high resolution

Tool Modes

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