Picture of Filmetrics F50 EXR
Current status:
AVAILABLE
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TECHNICAL SPECIFICATIONS

  • Models : Spectral reflectance and Fast Fourier Transform
  • Thickness : From 20 nm to 250 µm
  • Wave-length range : 380 < λ < 1700 nm
  • Wafer Chuck: Motorized rotation stage (f=100mm max) with vacuum substrate fixation
  • Mapping: Custom map patterns (polar, rectangular, linear…)
  • Acquisition speed : 2 points per second
  • Spot size : 1.5 mm
  • Filter : High-Pass Filter (λ > 550nm)

APPLICATIONS :

  • Automated film thickness & index mapping
  • Various refractive materials (photoresist, oxides, nitrides…)
  • Stacked refractive materials
  • Materials on various substrates

 

Tool name:
Filmetrics F50 EXR
Area/room:
SB2 - Lithographie 2 (Aligneurs)
Category:
Lithography
Manufacturer:
Filmetrics
Model:
F50 EXR
Max booking time, day:
8 hours
Max booking time, night:
0 hours
No. of future bookings:

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