Picture of ICPECVD
Current status:
AVAILABLE
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2nd Responsible:
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Tool name:
ICPECVD
Area/room:
SB2 - Dépôt - Fours
Category:
Deposition
Manufacturer:
Sentech
Model:
SI 500D
Max booking time, day:
8 hours
Max booking time, night:
0 hours
No. of future bookings:

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