TECHNICAL SPECIFICATIONS

APPLICATIONS

FEATURES

Filament : W

Voltage : 200 V to 30 kV

Current < 2µA

High vacuum (10^-4 Pa), low vacuum (<130 Pa) and ESEM (<2600 Pa) modes

IR Camera / NavCam

Surface and cross-section observations, 3D reconstruction, Chemical analyses (EDS)

DETECTORS

• Everhart-Thornley SE detector (res. 5 nm @ 30 kV & 10 nm @ 3 kV)
• vCD semi-conductor BSE detector (res. 5 nm @ 30 kV)
• Gaseous SE detector for environnemental mode
• EDS SDD 10 mm² (qualitative and quantitative analysis, mapping) / Element detection from Boron, resolution < 133 eV for tx > 100.000 cps
• MiniCL detector for cathodoluminescence

STAGE

Pseudo-eucentric stage: 5 axes 100 mm x 100 mm (tilt until 70°)