Picture of Profilomètre confocal Nanojura
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TECHNICAL SPECIFICATIONS

APPLICATIONS

MEASUREMENT CAPABILITIES

Z Resolution: a few nm

XY resolution: 7µm (Nobis 400) or 11µm (Nobis 1000)

Maximum slope on smooth surface: 30°

Surface profile measurement

SAMPLE STAGE

Large stage suitable for Ø>100mm

Thickness range: 0-100 mm

XY scanning range: 100mm x 100mm

XYZ translation table resolution: 0.1µm

OPTICS

Confocal probe Nobis 400 and 1000

Z measurement range : 400µm/7µm spot or 1000µm/11µm spot

Tool name:
Profilomètre confocal Nanojura
Area/room:
SB1 - Caractérisation
Category:
Characterization
Manufacturer:
Nanojura
Model:
UHP
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

Instructors

Licensed Users

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