TECHNICAL SPECIFICATIONS
APPLICATIONS
MEASUREMENT CAPABILITIES
Z Resolution: a few nm
XY resolution: 7µm (Nobis 400) or 11µm (Nobis 1000)
Maximum slope on smooth surface: 30°
Surface profile measurement
SAMPLE STAGE
Large stage suitable for Ø>100mm
Thickness range: 0-100 mm
XY scanning range: 100mm x 100mm
XYZ translation table resolution: 0.1µm
OPTICS
Confocal probe Nobis 400 and 1000
Z measurement range : 400µm/7µm spot or 1000µm/11µm spot